Book description
A one-stop, concise guide on determining and measuring thin film
thickness by optical methods.
This practical book covers the laws of electromagnetic radiation and
interaction of light with matter, as well as the theory and practice
of thickness measurement, and modern applications. In so doing, it
shows the capabilities and opportunities of optical thickness
determination and discusses the strengths and weaknesses of
measurement devices along with their evaluation methods.
Following an introduction to the topic, Chapter 2 presents the basics
of the propagation of light and other electromagnetic radiation in
space and matter. The main topic of this book, the determination of
the thickness of a layer in a layer stack by measuring the spectral
reflectance or transmittance, is treated in the following three
chapters. The color of thin layers is discussed in chapter 6. Finally,
in chapter 7, the author discusses several industrial applications of
the layer thickness measurement, including high-reflection and
anti-reflection coatings, photolithographic structuring of
semiconductors, silicon on insulator, transparent conductive films,
oxides and polymers, thin film photovoltaics, and heavily doped silicon.
Aimed at industrial and academic researchers, engineers, developers
and manufacturers involved in all areas of optical layer and thin
optical film measurement and metrology, process control, real-time
monitoring, and applications.
Dr. Michael Quinten
works as Head of Research and Development Sensors at FRT GmbH in
Bergisch Gladbach, Germany. Having obtained his diploma degree and Ph.
D. in physics (1989) at the University of Saarland, Saarbruecken,
Germany, he joined the Technical University RWTH Aachen in 1990 to work
as a physics fessor. He then spent four years at several universities in
Graz (Austria), Chemnitz, Aachen, Saarbruecken and Bochum (Germany).
During his academic career, he authored 50 scientific publications on
optical properties of nanoparticles, nanoparticle materials, and
aerosols. In 2001, he joined the ETA-Optik GmbH, Germany, where he first
worked in research and development of integrated optics components, and
later became a product manager in the Colour and Coatings Division.
During this period, he became expert in optical layer thickness
determination. In 2007, he moved to FRT GmbH where he is responsible for
the optical sensor technology division. He is the author of
Optical
Properties of Nanoparticle Systems: Mie and Beyond
, Hardcover, 502 pages, Publisher: Wiley-VCH; 1 edition (March 15,
2011), ISBN10: 9783527410439, ISBN-13: 978-3527410439.
