Book description
This accessible text is now fully revised and updated, providing an
overview of fabrication technologies and materials needed to realize
modern microdevices. It demonstrates how common microfabrication
principles can be applied in different applications, to create devices
ranging from nanometer probe tips to meter scale solar cells, and a host
of microelectronic, mechanical, optical and fluidic devices in between.
Latest developments in wafer engineering, patterning, thin films,
surface preparation and bonding are covered.
This second edition includes:
- expanded sections on MEMS and microfluidics related fabrication issues
- new chapters on polymer and glass microprocessing, as well as
serial processing techniques
- 200 completely new and 200 modified figures
- more coverage of imprinting techniques, process integration and
economics of microfabrication
- 300 homework exercises including conceptual thinking
assignments, order of magnitude estimates, standard calculations,
and device design and process analysis problems
- solutions to homework problems on the complementary website, as
well as PDF slides of the figures and tables within the book
With clear sections separating basic principles from more advanced
material, this is a valuable textbook for senior undergraduate and
beginning graduate students wanting to understand the fundamentals of
microfabrication. The book also serves as a handy desk reference for
practicing electrical engineers, materials scientists, chemists and
physicists alike.
www. wiley.
com/go/Franssila_Micro2e
Professor Sami Franssila, Helsinki University of
Technology, Finland
Sami Franssila has taught courses on microfluidics, bioMEMs,
microsystems, nanoscience, silicon microtechnology and thin-film
technology at Helsinki University of Technology since 1998. He is
group leader of the Microfabrication group at Micronova, the Centre
for Micro and Nanotechnology which is run jointly by the VTT Technical
Research Centre of Finland and Helsinki University of
Technology.
Professor Franssila researches into micro- and
nanofabrication for fluidic, chemical and biological devices, chemical
microsystems and thin film technology.
He has authored or
co-authored over 60 peer reviewed articles, 120 international
conference papers and written one textbook Introduction to
Microfabrication, published by John Wiley & Sons in 2004.
