Book description
The fabrication of an integrated circuit requires a variety of physical
and chemical processes to be performed on a semiconductor substrate. In
general, these processes fall into three categories: film deposition,
patterning, and semiconductor doping. Films of both conductors and
insulators are used to connect and isolate transistors and their components.
By creating structures of these various components millions of
transistors can be built and wired together to form the complex
circuitry of modern microelectronic devices. Fundamental to all of
these processes is lithography, ie, the formation of three-dimensional
relief images on the substrate for subsequent transfer of the pattern
to the substrate.
This book presents a complete theoretical and practical treatment of
the topic of lithography for both students and researchers. It
comprises ten detailed chapters plus three appendices with problems
provided at the end of each chapter.
Additional Information:
Visiting http://www.
lithoguru. com/textbook/index. html enhances the reader's
understanding as the website supplies information on how you can
download a free laboratory manual, Optical Lithography Modelling with
MATLAB®, to accompany the textbook. You can also contact the author
and find help for instructors.
Dr. Chris A. Mack developed the lithography
simulation software PROLITH, and founded and ran the company FINLE
Technologies fro ten years. He then served as Vice President of
Lithography Technology for KLA-Tencor for five years, until 2005. In
2003 he received the SEMI Award for North America for his efforts in
lithography simulation and education. He is also an adjunct faculty
member at the University of Texas at Austin. Currently, he writes,
teaches, and consults on the field of semiconductor microlithography
in Austin, Texas.
