Book description
The building blocks of MEMS design through closed-form solutions
Microelectromechanical Systems, or MEMS, is the technology of very
small systems; it is found in everything from inkjet printers and cars
to cell phones, digital cameras, and medical equipment. This book
describes the principles of MEMS via a unified approach and
closed-form solutions to micromechanical problems, which have been
recently developed by the author and go beyond what is available in
other texts. The closed-form solutions allow the reader to easily
understand the linear and nonlinear behaviors of MEMS and their design applications.
Beginning with an overview of MEMS, the opening chapter also presents
dimensional analysis that provides basic dimensionless parameters
existing in large- and small-scale worlds. The book then explains
microfabrication, which presents knowledge on the common fabrication
process to design realistic MEMS. From there, coverage includes:
-
Statics/force and moment acting on mechanical structures in
static equilibrium
-
Static behaviors of structures consisting of mechanical
elements
-
Dynamic responses of the mechanical structures by the solving
of linear as well as nonlinear governing equations
-
Fluid flow in MEMS and the evaluation of damping force acting
on the moving structures
-
Basic equations of electromagnetics that govern the electrical
behavior of MEMS
-
Combining the MEMS building blocks to form actuators and
sensors for a specific purpose
All chapters from first to last use a unified approach in which
equations in previous chapters are used in the derivations of
closed-form solutions in later chapters. This helps readers to easily
understand the problems to be solved and the derived solutions. In
addition, theoretical models for the elements and systems in the later
chapters are provided, and solutions for the static and dynamic
responses are obtained in closed-forms.
This book is designed for senior or graduate students in electrical
and mechanical engineering, researchers in MEMS, and engineers from
industry. It is ideal for radio frequency/electronics/sensor
specialists who, for design purposes, would like to forego numerical
nonlinear mechanical simulations. The closed-form solution approach
will also appeal to device designers interested in performing
large-scale parametric analysis.
ki bang lee, PhD, is Director of KB Lab in Singapore. He has made
numerous contributions in micro- and nano-electromechanical systems.
From 2000 to 2004, Dr. Lee was a researcher at University of
California, Berkeley. He worked for Samsung during 1987-2000, most
recently holding the position of principal research scientist. He
earned his PhD in mechanical engineering at Korea Advanced Institute
of Science and Technology (KAIST).
